Improved Resolution Enhancement Technique for Broadband Illumination in Flat Panel Display Lithography

Resolution enhancement optimization methods in optical lithography with improved manufacturability

Flexible Flat Panel Display Technology

The manufacturing of flat panel displays is a dynamic and continuously evolving industry. Improvements of flat panel displays are made rapidly as technology improves and new discoveries are made by display scientists and engineers. The cathode ray tube and active matrix liquid crystal display (LCD) recently celebrated their 100th and 25th anniversary, respectively. The arrival of portable elect...

TCAD development for lithography resolution enhancement

Advances in lithography have contributed significantly to the advancement of the integrated circuit technology. While nonoptical next-generation lithography (NGL) solutions are being developed, optical lithography continues to be the workhorse for high-throughput very-large-scale integrated (VLSI) lithography. Extending optical lithography to the resolution levels necessary to support today’s a...

Medium Induced Resolution Enhancement for Broadband Imaging

A number of recent studies discuss the phenomenon of super resolution, that is, the fact that a target can be localized with higher resolution than half a wavelength as suggested by the classical diffraction limit. Here we discuss a special type of super resolution corresponding to a high contrast in wave speed at the location of respectively the point of observation and the one of the target. ...

Hybrid Laser Cutting for Flat Panel Display Glass

Department of Electronics and Computer Engineering, Hanyang University, Seoul 133-791, Korea Department of Industrial, Welding and Systems Engineering, The Ohio State University, Columbus, OH 43210, U.S.A. School of Mechanical and Automotive Engineering, Keimyung University, Taegu 704-701, Korea National Core Research Center for Hybrid Materials Solution, Pusan National University, Busan 609-73...